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Although it has such significances, there has been no place for the academic-industrial experts in semiconductor process diagnosis technique in Korea to make discussions together, but 26th, June of the last year, for the first time in Korea, 'The first workshop on semiconductor process diagnosis", where many of related experts participated, were held by KRISS, which demonstrated the magnificent interests in those techniques. Therefore, this association has been founded in order to contribute to the improvement of semiconductor process diagnosis technique in Korea by organizing the regular academic-industrial cooperative technological exchange meeting. This association will take interests in and carry out continuous technological exchanges for the overall semiconductor process diagnosis techniques, including ▲ precursor diagnosis ▲CVD/ALD process diagnosis ▲plasma process diagnosis ▲contaminated particle diagnosis and control ▲ related S/W and framework.